Effect of annealing temperature on piezoelectric and mechanical properties of (Bi0.5Na0.5)TiO3–(Bi0.5K0.5)TiO3–BaTiO3 thin films. Issue 1 (January 2016)

• Record Type: Journal Article
• Authors: Zhan, K.; Su, M.; Han, H.; Xie, S.F.; Zhu, Y.K.; Wang, D.; Cheng, H.B.; Wang, X.Y.
• Is Part Of: Ceramics international. Volume 42:Issue 1:Part B(2016)
• Page Start: 1627
• Page End: 1632
• Publication Date: 2016-01
• Subjects: Thin film -- Bismuth titante -- PFM -- Piezoelectric; Ceramics -- Periodicals; Céramique industrielle -- Périodiques; Ceramics; Periodicals; Electronic journals; 666
• DOI: 10.1016/j.ceramint.2015.09.114
• Languages: English
• ISSNs: 0272-8842

Abstract

Abstract: Polycrystalline piezoelectric lead-free 85 mol% (Bi0.5 Na0.5 )TiO3 –10 mol% (Bi0.5 K0.5 )TiO3 –5 mol% BaTiO3 (85BNT–10BKT–5BT) thin films were fabricated at different annealing temperatures by a chemical solution deposition method on Pt/Ti/SiO2 /Si substrates. Perovskite phase was achieved during annealing at 650–800 °C. The effect of annealing temperature on piezoelectric and mechanical properties was investigated. The results show that 85BNT–10BKT–5BT thin films annealed at 700 °C exhibit the largest effective d 33 value of 140.4 pm/V, and the highest elastic modulus 142.0 GPa. The optimal properties can be attributed to dense domain and homogenous microstructure. Results show that 85BNT–10BKT–5BT thin films may be a good candidate for lead-free piezoelectric-based micro-electromechanical systems.