Evaluation of elasto-plastic properties of ITO film using combined nanoindentation and finite element approach. Issue 1 (January 2016)

• Record Type: Journal Article
• Authors: Gupta, Ankur Kumar; Porwal, Deeksha; Dey, Arjun; Sridhara, N.; Mukhopadhyay, Anoop Kumar; Sharma, Anand Kumar; Barshilia, Harish C.
• Is Part Of: Ceramics international. Volume 42:Issue 1:Part B(2016)
• Page Start: 1225
• Page End: 1233
• Publication Date: 2016-01
• Subjects: Indium tin oxide -- Nanoindentation -- Finite element model -- Elasto-plastic properties -- Stress–strain; Ceramics -- Periodicals; Céramique industrielle -- Périodiques; Ceramics; Periodicals; Electronic journals; 666
• DOI: 10.1016/j.ceramint.2015.09.054
• Languages: English
• ISSNs: 0272-8842

Abstract

Abstract: Here we report for the first time the combined nanoindentation experiments and finite element modeling to investigate the in-depth nanomechanical behavior of ~1.25 μm indium tin oxide (ITO) film. The ITO film is grown on silicon substrate by a reactive direct current (DC) magnetron sputtering technique. Here, the contributions of both film and substrate are considered in a power law based nonlinear material model. Based on experimental data a detailed study is carried out in the present work to investigate the stress–strain behavior, the related von-Mises stress and equivalent plastic strain of the ITO film. In addition, the effect of the nanoindentation response of the ITO film on the silicon substrate is also evaluated.