Fabrication of hierarchical Sn-doped ZnO nanorod arrays through sonicated sol−gel immersion for room temperature, resistive-type humidity sensor applications. Issue 8 (June 2016)

• Record Type: Journal Article
• Authors: Ismail, A.S.; Mamat, M.H.; Md. Sin, N.D.; Malek, M.F.; Zoolfakar, A.S.; Suriani, A.B.; Mohamed, A.; Ahmad, M.K.; Rusop, M.
• Is Part Of: Ceramics international. Volume 42:Issue 8(2016)
• Page Start: 9785
• Page End: 9795
• Publication Date: 2016-06
• Subjects: Humidity sensor -- Sn-doped ZnO -- Nanorod -- Immersion -- Structural properties; Ceramics -- Periodicals; Céramique industrielle -- Périodiques; Ceramics; Periodicals; Electronic journals; 666
• DOI: 10.1016/j.ceramint.2016.03.071
• Languages: English
• ISSNs: 0272-8842

Abstract

Abstract: Hierarchical tin (Sn)-doped zinc-oxide (ZnO) nanorod arrays (SZO) were deposited onto Al-doped ZnO-coated glass substrate by using a sonicated sol–gel immersion method for resistive-type humidity sensor applications. X-ray diffraction patterns revealed that the deposited SZO arrays exhibit a wurtzite structure. SZO possessed smaller average diameter, crystallite size, and thickness than the undoped sample did. The SZO film also exhibited compressive strain and tensile stress values of −0.033% and 77 MPa, respectively. Our result showed the sensitivity of the SZO based-sensor improved compared with that of the undoped ZnO, with values of 3.41 and 1.41 at 40% to 70% RH and 70% to 90% RH, respectively. The response and recovery times of the SZO based humidity sensor improved to 230 and 30 s, respectively. All these results indicated that SZO had high potential for humidity-sensor applications.