Cite
HARVARD Citation
Ključar, L. et al. (2016). Evaluation of via density and low-k Young's modulus influence on mechanical performance of advanced node multi-level Back-End-Of-Line. Microelectronics and reliability. pp. 93-100. [Online].
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Ključar, L. et al. (2016). Evaluation of via density and low-k Young's modulus influence on mechanical performance of advanced node multi-level Back-End-Of-Line. Microelectronics and reliability. pp. 93-100. [Online].