TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements. (30th July 2015)

• Record Type: Journal Article
• Authors: Spende, Anne; Sobel, Nicolas; Lukas, Manuela; Zierold, Robert; Riedl, Jesse C; Gura, Leonard; Schubert, Ina; Moreno, Josep M Montero; Nielsch, Kornelius; Stühn, Bernd; Hess, Christian; Trautmann, Christina; Toimil-Molares, Maria E
• Is Part Of: Nanotechnology. Volume 26:Number 33(2015)
• Publication Date: 2015-07-30
• Subjects: ion-track technology -- atomic layer deposition -- single-pore -- polycarbonate membrane -- ion transport -- nanotubes; Nanotechnology -- Periodicals; Nanotechnology -- Periodicals; Nanotechnology; Publications périodiques; Nanotechnologies; Periodicals; 620.5
• DOI: 10.1088/0957-4484/26/33/335301
• Languages: English
• ISSNs: 0957-4484

Abstract

Abstract: Low-temperature atomic layer deposition (ALD) of TiO2, SiO2, and Al2 O3 was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18–55 nm) and film thicknesses (5–22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 μ m long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface.