A MEMS Flow Compensated Thermal Conductivity Detector for Gas Sensing. (2015)

• Record Type: Journal Article
• Authors: de Graaf, G.; Abarca, A.; Ghaderi, M.; Wolffenbuttel, R.F.
• Is Part Of: Procedia engineering. Volume 120(2015)
• Page Start: 1265
• Page End: 1268
• Publication Date: 2015
• Subjects: Thermal conductivity detector -- flow compensation -- MEMS gas sensor.; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2015.10.043
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: A novel dual-Thermal conductivity detector (TCD) is presented for in-line flow compensation. TCDs generally demonstrate a flow dependence requiring calibration at a fixed flow rate. This dual-TCD is composed of two thin-film sensors on membranes in parallel on the same chip that are differentially operated. Both are laterally identical, but with a difference in quasi-static thermal conductivity by a different sample chamber. A reduced flow rate dependence is possible under conditions described in this work. Simulations of the dual-TCD that verify its operation are presented. The device is fabricated using both bulk and surface micromachining. Currently, prototypes are being fabricated and measurements results are forthcoming.