Design and experiment of 4H-SiC JBS diodes achieving a near-theoretical breakdown voltage with non-uniform floating limiting rings terminal. (September 2016) - Yuan, Hao
Highlights: The key parameters of FLRs termination are analyzed. A near-ideal breakdown voltage of 3.7 kV is achieved. The experimental results show a great agreement with simulated results. Abstract: In this paper, a 4H-SiC Junction Barrier Schottky diode (JBS) with non-uniform floating limiting rings (FLRs) has been investigated and fabricated using n type 4H-SiC epitaxial layer with thickness of 31 μm and doping concentration of 3.3 × 10 15 cm −3 . According to the simulated results, the key parameters of a FLRs design to achieve a high voltage are the minimum space between two adjacent doped rings, spacing growth step and number of rings. The experimental results also show a great agreement with simulated results. Meanwhile, a near-ideal breakdown voltage of 3.7 kV was achieved, which yield around 95% of the parallel-plane breakdown voltage. The forward characteristics show that the fabricated JBS diodes have a forward current density of 210 A/cm 2 at 3 V and a specific on-resistance ( R sp-on ) of 7.58 mΩ cm 2 . Different FLRs parameters have no effect on the forward device performance.