Tin Oxide Microheater for Chemical Sensors. Issue 1 (January 2016)

• Record Type: Journal Article
• Authors: Gharesi, Mohsen; Ansari, Mohammad
• Is Part Of: IOP conference series. Volume 108:Issue 1(2016)
• Publication Date: 2016-01
• Subjects: Tin oxide -- Microheater -- Gas sensor -- Thin film -- Spray pyrolysis; Materials science -- Periodicals; 620.1105
• DOI: 10.1088/1757-899X/108/1/012018
• Languages: English
• ISSNs: 1757-8981

Abstract

Abstract: Tin oxide is the main material utilized for the fabrication of chemical sensing pellets which operate at elevated temperatures. The heating is commonly carried out with ruthenium dioxide resistors. Here, a tin oxide-based microheater is developed for microsensor applications. These microheaters are fabricated on 0.5 mm thick alumina substrates using spray pyrolysis technique. The optimum SnO2 heaters have a sheet resistivity in the 40-70 Ω/a range. Ohmic Ag/SnO2 contacts are formed by silver paste printing followed by an appropriate thermal annealing, which provide connections to the external circuitry. Durability tests are carried out on several samples; the long-term performance of the fabricated devices is satisfactory. The method allows the elimination of the expensive ruthenium dioxide from the structure of generic gas sensors.