Semiconductor manufacturing intelligence and automation. (September 2016)

Record Type:: Journal Article
Title:: Semiconductor manufacturing intelligence and automation. (September 2016)
Main Title:: Semiconductor manufacturing intelligence and automation
Authors:: Chien, Chen-Fu
Hsu, Chia-Yu
Morrison, James R.
Dou, Runliang
Abstract:
Is Part Of:: Computers & industrial engineering. Volume 99(2016)
Journal:: Computers & industrial engineering
Issue:: Volume 99(2016)
Issue Display:: Volume 99, Issue 2016 (2016)
Year:: 2016
Volume:: 99
Issue:: 2016
Issue Sort Value:: 2016-0099-2016-0000
Page Start:: 315
Page End:: 317
Publication Date:: 2016-09
Subjects:: Engineering -- Data processing -- Periodicals
Industrial engineering -- Periodicals
620.00285
Journal URLs:: http://www.sciencedirect.com/science/journal/03608352 ↗
http://www.elsevier.com/journals ↗
DOI:: 10.1016/j.cie.2016.06.020 ↗
Languages:: English
ISSNs:: 0360-8352
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library DSC - 3394.713000
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store
Ingest File:: 7560.xml