New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope. (23rd April 2018)

• Record Type: Journal Article
• Authors: Stehling, Nicola; Masters, Robert; Zhou, Yangbo; O'Connell, Robert; Holland, Chris; Zhang, Hongzhou; Rodenburg, Cornelia
• Is Part Of: MRS communications. Volume 8:Number 2(2018)
• Page Start: 226
• Page End: 240
• Publication Date: 2018-04-23
• Subjects: Materials -- Periodicals; 620.11
• DOI: 10.1557/mrc.2018.75
• Languages: English
• ISSNs: 2159-6859

Abstract

Abstract: Abstract : The helium ion microscope (HeIM) holds immense promise for nano-engineering and imaging with scope for in-situ chemical analysis. Here we will examine the potential of secondary electron hyperspectral imaging (SEHI) as a new route to exploring chemical variations in both two and three dimensions. We present a range of early applications in the context of image interpretation in wider materials science and process control in ion beam-based nano-engineering. Necessary steps for SEHI in the HeIM to evolve into a reliable technique which can be fully embedded into nano-engineering workflows are considered.