Cite
HARVARD Citation
Zhang, Y. et al. (2015). Influence of mixture compositions on ion energy distributions in Ar/N2 electron cyclotron resonance plasma. Vacuum. pp. 174-178. [Online].
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Zhang, Y. et al. (2015). Influence of mixture compositions on ion energy distributions in Ar/N2 electron cyclotron resonance plasma. Vacuum. pp. 174-178. [Online].