Investigation of the occupancy ratio dependence for microlens arrays on diamond. Issue 52 (20th August 2018) - Zhu, Tian-Fei
Abstract : Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Abstract : Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricated microlens arrays exhibited a uniform arrangement and good optical performance.