76‐4: Late-News Paper: Flat Panel Fingerprint/Touch‐input Image Sensor Using a‐Si TFT Photo‐transistor and Four‐Mask Process Architecture Technology. Issue 1 (30th May 2018)

• Record Type: Journal Article
• Authors: Cho, An-Thung; Liu, Zhen; Liu, Kai-jun; Yang, Feng-yun; Mo, Qiong-hua; Hsu, James; Chen, Wade; Lu, York
• Is Part Of: Digest of technical papers. Volume 49:Issue 1(2018)
• Page Start: 1024
• Page End: 1027
• Publication Date: 2018-05-30
• Subjects: Fingerprint/Optical-input sensor -- image sensor -- a-Si TFT phototransistor -- four-mask technology; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.12195
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : An Optical type fingerprint scanning/touch‐input flat panel is designed. The driving system is based on the passive pixel sensor (PPS) array with amorphous silicon (a‐Si) TFT technology. The embedded sensing structure of the optical sensor is using the a Si TFT phototransistor and four‐mask process architecture technology. The pixel density is over 500 PPI and the a‐Si TFT phototransistor sensor is high reliability by using Multi‐N+ layer in the a‐Si TFT structure.