Cite
HARVARD Citation
Bao, F. et al. (2018). Multi-stage phononic crystal structure for anchor-loss reduction of thin-film piezoelectric-on-silicon microelectromechanical-system resonator. Applied physics express. p. . [Online].
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Bao, F. et al. (2018). Multi-stage phononic crystal structure for anchor-loss reduction of thin-film piezoelectric-on-silicon microelectromechanical-system resonator. Applied physics express. p. . [Online].