Comparison of Microstructure and Tribological Behaviors of CrAlN and CrN Film Deposited by DC Magnetron Sputtering. Issue 4 (April 2018)

• Record Type: Journal Article
• Authors: Xingrun, Ren; Zhu, Huang; Meixia, Liu; Jiangao, Yang; Hao, Chen
• Is Part Of: Xi you jin shu cai liao yu gong cheng. Volume 47:Issue 4(2018)
• Page Start: 1100
• Page End: 1106
• Publication Date: 2018-04
• Subjects: magnetron sputtering -- CrAlN film -- CrN film -- microstructure -- tribological behaviors; Nonferrous metals -- Periodicals; 669.05
• DOI: 10.1016/S1875-5372(18)30127-9
• Languages: English
• ISSNs: 1875-5372

Abstract

Abstract : Abstract: CrAlN and CrN films were deposited on 304 stainless steel substrate by direct current magnetron sputtering. The effects of Al incorporation on the composition and microstructure for CrN film were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectrons spectroscopy (XPS), atom force microscope (AFM). The tribological behaviors of CrN and CrAlN films were characterized by wear tester against Si3 N4 ball of 3 mm in diameter under different conditions and the wear profiles of film were characterized by Nanomap 500LS. The results show that the main phases of CrN film are CrN and Cr2 N phase and the main phases of CrAlN film are Cr2 N and CrAlN phases. The CrAlN film presents CrAlN (200) preferred orientation and CrN film presents CrN (200) preferred orientation. In terms of CrAlN film, parts of Cr atoms are taken place by Al atoms to form the CrAlN phase which is beneficial to refining grain and improving the comprehensive performance of CrAlN film. Therefore, CrAlN film exhibits a better wear-resistance performance and a lower wear rate than CrN film in all the conditions.