Spectral characterisation of aperiodic normal-incidence Sb/B4C multilayer mirrors for the λ < 124 Å range. (March 2018)

• Record Type: Journal Article
• Authors: Vishnyakov, E.A.; Kopylets, I.A.; Kondratenko, V.V.; Kolesnikov, A.O.; Pirozhkov, A.S.; Ragozin, E.N.; Shatokhin, A.N.
• Is Part Of: Quantum electronics. Volume 48:Number 3(2018)
• Page Start: 189
• Page End: 196
• Publication Date: 2018-03
• Subjects: soft X-ray range -- multilayer mirrors -- antimony -- boron carbide -- Sb/B4C -- aperiodic structures -- normal radiation incidence; Quantum electronics -- Periodicals; 537.5
• DOI: 10.1070/QEL16574
• Languages: English
• ISSNs: 1063-7818

Abstract

Abstract: Three broadband aperiodic Sb/B4 C multilayer mirrors were synthesised for the purposes of soft X-ray optics and spectroscopy in the wavelength range beyond the L-edge of Si ( λ < 124 Å), and their reflection spectra were measured. The multilayer structures were optimised for maximum uniform reflectivity in the ranges 100 – 120 Å, 95 – 105 Å and 90 – 100 Å. The reflection spectra were recorded using a laboratory laser-plasma radiation source and an electronic detector with a 2D spatial resolution (a CCD matrix with 13 × 13 μm sized pixels). The experimental spectra are compared with theoretical calculations. The effect of lower antimony and B4 C layer densities on the reflection spectra is discussed.