Diffractive optics based on modulated subwavelength-domain V-ridge gratings. (24th June 2016)

• Record Type: Journal Article
• Authors: Bose, Gaurav; Verhoeven, Antonie; Vartiainen, Ismo; Roussey, Matthieu; Kuittinen, Markku; Tervo, Jani; Turunen, Jari
• Is Part Of: Journal of optics. Volume 18:Number 8(2016:Aug.)
• Publication Date: 2016-06-24
• Subjects: diffraction -- gratings -- subwavelength optics -- beam splitting -- lithography -- wet etching; Optics -- Periodicals; 535.05
• DOI: 10.1088/2040-8978/18/8/085602
• Languages: English
• ISSNs: 2040-8978

Abstract

Abstract: We study the properties of reflection-type V-ridge gratings in the subwavelength domain and describe a method to realize diffractive optical elements by using such gratings as signal carriers. In particular, we utilize a coding scheme based on position modulation of a high-frequency V-ridge carrier grating. We design and demonstrate beam splitting elements using this coding scheme, electron-beam lithography, anisotropic wet etching of silicon, hot embossing of polymer, and metal deposition. These elements have the outstanding property of operating over a large spectral range from 406 to 520 nm. The measured diffraction patterns show excellent agreement with theoretical results given by rigorous diffraction theory.