Design optimization and performance analysis of deformed optical readout focal plane array. (15th May 2015)

• Record Type: Journal Article
• Authors: Fu, Jianyu; Shang, Haiping; Shi, Haitao; Li, Zhigang; Yi, Ou; Chen, Dapeng; Zhang, Qingchuan
• Is Part Of: Journal of micromechanics and microengineering. Volume 25:Number 6(2015:Jun.)
• Publication Date: 2015-05-15
• Subjects: focal plane array -- infrared imaging -- optical readout.; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/25/6/065012
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: An optical readout focal plane array (FPA) usually has a bent cantilever due to the micro-machining techniques. This bent morphology has a strong negative impact on optical sensitivity, which is a key factor that affects the imaging performance. In this study, an optical readout FPA with a stiffener-supported pixel is presented in order to reduce the deformation. The theoretical analysis has been developed to optimize the structure. Based on this, an FPA with a stiffener-supported pixel is fabricated. It is demonstrated that the curvature radius and optical sensitivity can increase by 5 times and 5.74 times respectively with respect to that without a stiffener. Better thermal imaging has been achieved.