Linear micromechanical stepping drive for pinhole array positioning. (7th April 2015)

• Record Type: Journal Article
• Authors: Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Hoffmann, Martin
• Is Part Of: Journal of micromechanics and microengineering. Volume 25:Number 5(2015:May)
• Publication Date: 2015-04-07
• Subjects: microactuator -- stepping drive -- linear micromotor -- hyperspectral imaging -- inch-worm drive -- SOI technology -- electrostatic comb drive; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/25/5/055009
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: A compact linear micromechanical stepping drive for positioning a 7 × 5.5 mm 2 optical pinhole array is presented. The system features a step size of 13.2 µ m and a full displacement range of 200 µ m. The electrostatic inch-worm stepping mechanism shows a compact design capable of positioning a payload 50% of its own weight. The stepping drive movement, step sizes and position accuracy are characterized. The actuated pinhole array is integrated in a confocal chromatic hyperspectral imaging system, where coverage of the object plane, and therefore the useful picture data, can be multiplied by 14 in contrast to a non-actuated array.