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HARVARD Citation
Somà, A. et al. (n.d.). Modeling and experimental verification of thermally induced residual stress in RF-MEMS. Journal of micromechanics and microengineering. p. . [Online].
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Somà, A. et al. (n.d.). Modeling and experimental verification of thermally induced residual stress in RF-MEMS. Journal of micromechanics and microengineering. p. . [Online].