A hybrid electrostatic micro-harvester incorporating in-plane overlap and gap closing mechanisms. (18th February 2015)

• Record Type: Journal Article
• Authors: Li, Yi; Çelik-Butler, Zeynep; Butler, Donald P
• Is Part Of: Journal of micromechanics and microengineering. Volume 25:Number 3(2015:Mar.)
• Publication Date: 2015-02-18
• Subjects: energy harvester -- UV LIGA -- electrostatic actuator -- vibrational energy harvesting; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/25/3/035027
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: This paper presents a novel design, fabrication and characterization of an electrostatic micro-energy scavenger, converting the environmental vibration. The design incorporates MEMS comb-drive in-plane overlap as well as in-plane gap closing topologies into one hybrid structure. The device geometry and dimensions are optimized to maximize the energy harvesting efficiency. UV-LIGA process combined with nickel electroplating is utilized to fabricate the devices. A shaker platform in conjunction with a calibrated accelerometer is used to measure the harvested ac voltage with varying acceleration. Peak to peak value of 0.800 V is generated under external acceleration magnitude of 78.4 m s −2 at a vibration frequency of 1.90 kHz. Power predictions based on electromechanical and finite element method (FEM) simulations agree with the measured data.