Nanoscale surface patterning of diamond utilizing carbon diffusion reaction with a microstructured titanium mold. Issue 1 (2018)

• Record Type: Journal Article
• Authors: Yan, Jiwang; Imoto, Yuji
• Is Part Of: CIRP annals. Volume 67:Issue 1(2018)
• Page Start: 181
• Page End: 184
• Publication Date: 2018
• Subjects: Diamond -- Nanostructure -- Surface integrity; Production engineering -- Research -- Periodicals; 670.5
• DOI: 10.1016/j.cirp.2018.04.067
• Languages: English
• ISSNs: 0007-8506

Abstract

Abstract: A novel method was proposed for generating nanoscale surface patterns on single-crystal diamond by carbon diffusion with a microstructured titanium mold under controlled temperature and pressure. The depth, geometry, and surface integrity of the fabricated patterns were investigated by laser micro-Raman spectroscopy and white-light interferometry, and the titanium molds were analyzed by energy dispersive X-ray spectroscopy. The results showed that at specific temperatures and pressures, three-dimensional patterns with a depth of tens of nanometers and sloped/curved walls could be generated on a diamond surface after a few minutes, without causing any surface graphitization. The intensity profile and penetration depth of carbon atoms into the titanium were experimentally measured.