Magnetic and electrical characterization of nickel-rich NiFe thin films synthesized by atomic layer deposition and subsequent thermal reduction. (25th July 2016)

• Record Type: Journal Article
• Authors: Espejo, A P; Zierold, R; Gooth, J; Dendooven, J; Detavernier, C; Escrig, J; Nielsch, K
• Is Part Of: Nanotechnology. Volume 27:Number 34(2016)
• Publication Date: 2016-07-25
• Subjects: NiFe thin films -- atomic layer deposition -- magnetic characterization -- electrical characterization -- thermal reduction; 75.10.-i -- 75.20.En -- 75.60.Nt -- 81.07.De -- 74.62.Bf; Nanotechnology -- Periodicals; Nanotechnology -- Periodicals; Nanotechnology; Publications périodiques; Nanotechnologies; Periodicals; 620.5
• DOI: 10.1088/0957-4484/27/34/345707
• Languages: English
• ISSNs: 0957-4484

Abstract

Abstract: Nickel-rich NiFe thin films (Ni92 Fe8, Ni89 Fe11 and Ni83 Fe17 ) were prepared by combining atomic layer deposition (ALD) with a subsequent thermal reduction process. In order to obtain Ni x Fe1− x O y films, one ALD supercycle was performed according to the following sequence: m NiCp2 /O3, with m = 1, 2 or 3, followed by one FeCp2 /O3 cycle. The supercycle was repeated n times. The thermal reduction process in hydrogen atmosphere was investigated by in situ x-ray diffraction studies as a function of temperature. The metallic nickel iron alloy thin films were investigated and characterized with respect to crystallinity, morphology, resistivity, and magnetism. As proof-of-concept magnetic properties of an array of Ni83 Fe17, close to the perfect Permalloy stoichiometry, nanotubes and an isolated tube were investigated.