Compact SMES with a superconducting film in a spiral groove on a Si wafer formed by MEMS technology with possible high-energy storage volume density comparable to that of rechargeable batteries. (15th November 2016)

• Record Type: Journal Article
• Authors: Sugimoto, N; Iguchi, N; Kusano, Y; Fukano, T; Hioki, T; Ichiki, A; Bessho, T; Motohiro, T
• Is Part Of: Superconductor science & technology. Volume 30:Number 1(2017:Jan.)
• Publication Date: 2016-11-15
• Subjects: SMES -- Si wafer -- trench -- MEMS -- electromagnetic stress -- spiral superconducting NbN coil; Superconductivity -- Periodicals; Superconductors -- Periodicals; 537.623
• DOI: 10.1088/0953-2048/30/1/015014
• Languages: English
• ISSNs: 0953-2048

Abstract

Abstract: The concept of a novel approach to make a compact SMES unit composed of a stack of Si wafers using a well-established MEMS process was proposed. The concept was backed up by pilot estimations for energy storage capacity and mechanical strength to endure electromagnetic stress. The estimated volume density of the storable energy is comparable to that of rechargeable batteries and the mechanical strength of Si wafer endures the electromagnetic stress imposed on it. These estimations support the feasibility of this novel concept, although there needs to be more detailed design of the system for its practical realization. Furthermore, there are a lot of challenges to overcome. The first step of the experimental proof of this new concept was successfully performed through several repeated test fabrications. In one of these test fabrications, the theoretically estimated upper limit value of the energy storage corresponding to a pilot design of a spiral superconducting NbN coil in the spiral trench formed on a Si wafer 10.15 cm in diameter was attained.