Cite
HARVARD Citation
Tang, G. et al. (n.d.). Validity evaluation of ScxAl1−xN material constants based on SAW characteristics. Journal of micromechanics and microengineering. p. . [Online].
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Tang, G. et al. (n.d.). Validity evaluation of ScxAl1−xN material constants based on SAW characteristics. Journal of micromechanics and microengineering. p. . [Online].