A review on the importance of surface coating of micro/nano-mold in micro/nano-molding processes. (19th November 2015)

• Record Type: Journal Article
• Authors: Saha, Biswajit; Toh, Wei Quan; Liu, Erjia; Tor, Shu Beng; Hardt, David E; Lee, Junghoon
• Is Part Of: Journal of micromechanics and microengineering. Volume 26:Number 1(2016:Jan.)
• Publication Date: 2015-11-19
• Subjects: micro/nano-mold -- surface coating -- hot-embossing -- injection molding -- replication -- tribology -- surface force; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/26/1/013002
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: Micro/nano hot-embossing and injection molding are two promising manufacturing processes for the mass production of workpieces bearing micro/nanoscale features. However, both the workpiece and micro/nano-mold are susceptive to structural damage due to high thermal stress, adhesion and friction, which occur at the interface between the workpiece and the mold during these processes. Hence, major constraints of micro/nano-molds are mainly attributed to improper replication and their inability to withstand a prolonged sliding surface contact because of high sidewall friction and/or high adhesion. Consequently, there is a need for proper surface coating as it can improve the surface properties of micro/nano-molds such as having a low friction coefficient, low adhesion and low wear rate. This review deals with the physical, mechanical and tribological properties of various surface coatings and their impact on the replication efficiency and lifetime of micro/nano-molds that are used in micro/nano hot-embossing and injection molding processes.