Enhanced DySEM imaging of cantilever motion using artificial structures patterned by focused ion beam techniques. (4th February 2016)

• Record Type: Journal Article
• Authors: Schröter, M-A; Ritter, M; Holschneider, M; Sturm, H
• Is Part Of: Journal of micromechanics and microengineering. Volume 26:Number 3(2016:Mar.)
• Publication Date: 2016-02-04
• Subjects: FIB patterning -- structured cantilever -- AFM -- modal analysis -- DySEM; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/26/3/035010
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: We use a dynamic scanning electron microscope (DySEM) to map the spatial distribution of the vibration of a cantilever beam. The DySEM measurements are based on variations of the local secondary electron signal within the imaging electron beam diameter during an oscillation period of the cantilever. For this reason, the surface of a cantilever without topography or material variation does not allow any conclusions about the spatial distribution of vibration due to a lack of dynamic contrast. In order to overcome this limitation, artificial structures were added at defined positions on the cantilever surface using focused ion beam lithography patterning. The DySEM signal of such high-contrast structures is strongly improved, hence information about the surface vibration becomes accessible. Simulations of images of the vibrating cantilever have also been performed. The results of the simulation are in good agreement with the experimental images.