Cite
HARVARD Citation
Xu, T. et al. (n.d.). Characterization of the mechanical behavior of SU-8 at microscale by viscoelastic analysis. Journal of micromechanics and microengineering. p. . [Online].
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Xu, T. et al. (n.d.). Characterization of the mechanical behavior of SU-8 at microscale by viscoelastic analysis. Journal of micromechanics and microengineering. p. . [Online].