Modified x-ray polymer refractive cross lens with adiabatic contraction and its realization. (7th April 2015)

• Record Type: Journal Article
• Authors: Nazmov, V; Mohr, J; Greving, I; Ogurreck, M; Wilde, F
• Is Part Of: Journal of micromechanics and microengineering. Volume 25:Number 5(2015:May)
• Publication Date: 2015-04-07
• Subjects: x-ray microoptics -- nanofocusing -- deep x-ray lithography; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/25/5/055010
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: A refractive x-ray lens with reduced focal length, due to continuous reduction in the designed aperture over the length of the lens, is presented. The lens elements have refractive parabolic sidewalls like geometrical prisms, with a varying cross section over the length of the lens, in accordance with the x-ray propagation law. The focusing effect occurs directly in the lens due to the fact that the initial x-ray beam is directed toward the focal point, and due to the phase retardation caused by the refractive properties of the sidewall surfaces. An array of such adiabatic lens elements with different optical parameters, arranged in a number of rows, represented by polymer microstructures, has been produced using x-ray lithography. Preliminary testing of the lenses has resulted in a focal spot of 67 nm at a photon energy of 18.6 keV.