Profile and depth prediction in single-pass and two-pass CO2 laser microchanneling processes. (4th February 2015)

• Record Type: Journal Article
• Authors: Prakash, Shashi; Kumar, Subrata
• Is Part Of: Journal of micromechanics and microengineering. Volume 25:Number 3(2015:Mar.)
• Publication Date: 2015-02-04
• Subjects: CO2 laser -- microchanneling -- PMMA; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/25/3/035010
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: Polymer based microfluidic channels are used in many chemical and biological devices. Polymethylmethacrylate (PMMA) has emerged as a key material for such devices owing to its high optical transparency and mechanical strength. The use of CO2 laser processing for fabricating microchannels on PMMA has been proved as an efficient and cost effective method. In this work, theoretical models for predicting microchannel profile and depth have been proposed. A model for single-pass laser processing has been proposed based on energy balance. A two-pass laser process for microchannel fabrication produces smoother microchannels with better surface topography and reduced bulging around the microchannel edges. An energy balance based model has also been proposed for two-pass processing. The experimental verification of the proposed models was conducted. Spectroscopic tests were carried out to determine the absorptivity, and simultaneous thermogravimetric analysis/differential scanning calorimetry (TGA/DSC) tests were performed to determine the thermo-physical properties of the PMMA used in the proposed model. The results predicted using the model were found to be in close agreement with the actual values.