Confocal total reflection X-ray fluorescence technology based on an elliptical monocapillary and a parallel polycapillary X-ray optics. (July 2018)

• Record Type: Journal Article
• Authors: Zhu, Yu; Wang, Yabing; Sun, Tianxi; Sun, Xuepeng; Zhang, Xiaoyun; Liu, Zhiguo; Li, Yufei; Zhang, Fengshou
• Is Part Of: Applied radiation and isotopes. Volume 137(2018:Jul.)
• Page Start: 172
• Page End: 176
• Publication Date: 2018-07
• Subjects: Total reflection X-ray fluorescence -- Monocapillary lens -- Single-layer film; Radiology -- Periodicals; Radiation -- Industrial applications -- Periodicals; Nuclear chemistry -- Periodicals; Internet resource; Periodical; 660.298
• DOI: 10.1016/j.apradiso.2018.04.004
• Languages: English
• ISSNs: 0969-8043

Abstract

Abstract: A total reflection X-ray fluorescence (TXRF) spectrometer based on an elliptical monocapillary X-ray lens (MXRL) and a parallel polycapillary X-ray lens (PPXRL) was designed. This TXRF instrument has micro focal spot, low divergence and high intensity of incident X-ray beam. The diameter of the focal spot of MXRL was 16.5 µm, and the divergence of the incident X-ray beam was 3.4 mrad. We applied this TXRF instrument to the micro analysis of a single-layer film containing Ni deposited on a Si substrate by metal vapor vacuum arc ion source. Highlights: This is the first time that a MXRL was used in the TXRF without using slit. The divergence of the X-ray beam emitted from the MXRL is sufficiently low to meet the requirements of the TXRL. Due to the micro focal spot of the incident X-ray beam and confocal technology, this new TXRF instrument will be widely used in the field of microscopic analysis, which will help improve the processing technology.