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HARVARD Citation
Karahashi, K. et al. (n.d.). Etching yields and surface reactions of amorphous carbon by fluorocarbon ion irradiation. Japanese journal of applied physics. p. . [Online].
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Karahashi, K. et al. (n.d.). Etching yields and surface reactions of amorphous carbon by fluorocarbon ion irradiation. Japanese journal of applied physics. p. . [Online].