Cite
HARVARD Citation
Xu, Y. et al. (2018). Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP. International journal of machine tools & manufacture. pp. 12-19. [Online].
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Xu, Y. et al. (2018). Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP. International journal of machine tools & manufacture. pp. 12-19. [Online].