Evaluation of electron tomography reconstruction methods for interface roughness measurement. Issue 5 (21st February 2018)

• Record Type: Journal Article
• Authors: Hayashida, Misa; Ogawa, Shinichi; Malac, Marek
• Other Names: Verkade Paul specialEditor.
• Is Part Of: Microscopy research and technique. Volume 81:Issue 5(2018)
• Page Start: 515
• Page End: 519
• Publication Date: 2018-02-21
• Subjects: buried interface roughness -- dose fractionation theorem -- electron tomography -- radiation damage -- semiconductor devices; Electron microscopy -- Technique -- Periodicals; Microscopy -- Periodicals; Microscopy -- Technique -- Periodicals; 502.825
• DOI: 10.1002/jemt.23006
• Languages: English
• ISSNs: 1059-910X

Abstract

Abstract: We evaluate the suitability of simultaneous iterative reconstruction technique (SIRT), filtered back projection, and simultaneous algebraic reconstruction technique methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over the entire tilt series on measured roughness values. We investigate the applicability of the dose fractionation theorem by evaluating the effect of an increasing number of images, i.e., decreasing tilt increment size at fixed total electron irradiation dose on the quantitative measurement of buried interface roughness. The results indicate that SIRT is the most suitable method for reconstruction and a 3° to 5° angle is optimal for the roughness measurement. Abstract : We evaluate the suitability of simultaneous iterative reconstruction technique, filtered back projection, and simultaneous algebraic reconstruction methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over the entire tilt series on measured roughness values.