Filling angle and its effect on filling process in roll-to-roll ultraviolet imprint lithography. (5th February 2018)

• Record Type: Journal Article
• Authors: Wang, Jianping; Li, Mujun; Qiu, Jinfeng; Zhou, Youquan
• Is Part Of: Journal of micromechanics and microengineering. Volume 28:Number 3(2018:Mar.)
• Publication Date: 2018-02-05
• Subjects: R2R imprinting -- bubble defects -- filling angle -- resin accumulation; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/aaa77d
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: Bubble defects are a serious problem in the roll-to-roll ultraviolet imprint lithography process. To investigate the air bubble trapping in microcavities, a numerical simulation method is proposed based on a sliding mesh and open-channel model. Such considerations in the model make it possible to include both the rotation of the roller and the flow of resin, which is different from the conventional methods. Through analysis with our model, a parameter, termed filling angle here, is found to be a significant factor in the imprinting process. With this parameter, the relationships between resin accumulation and bubble defects are studied. The differences in resin filling at different rotation velocities are also discussed. The experimental observations are in good agreement with the theoretical calculations. The results provide a deep understanding of the filling process, which can provide good theoretical guidance to eliminating bubble defects in industrial applications.