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Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer. Issue 27 (20th April 2018)
Record Type:
Journal Article
Title:
Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer. Issue 27 (20th April 2018)
Main Title:
Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
Abstract : Correction for 'EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer' by Cleverson Alves da Silva Moura et al., RSC Adv., 2018, 8, 10930–10938.