Wear and oxidation behavior of reactive sputtered δ-(Ti, Mo)N films deposited at different nitrogen gas flow rates. (July 2015)

• Record Type: Journal Article
• Authors: Komiyama, S.; Sutou, Y.; Oikawa, K.; Koike, J.; Wang, M.; Sakurai, M.
• Is Part Of: Tribology international. Volume 87(2015)
• Page Start: 32
• Page End: 39
• Publication Date: 2015-07
• Subjects: Coating -- Debris -- Self-lubricating; Tribology -- Periodicals; 621.89
• DOI: 10.1016/j.triboint.2015.02.005
• Languages: English
• ISSNs: 0301-679X

Abstract

Abstract: The wear properties of δ-(Ti, Mo)N films deposited at low and high nitrogen gas flow rates ( f N 2 ) were investigated. The film at f N 2 =2.0 sccm showed better adhesive wear resistance than that at f N 2 =0.3 sccm. Such improvement in the film at f N 2 =2.0 sccm was due to the formation of Mo oxide debris by wear oxidation. It was found that Mo oxidation more easily occurred in the film at f N 2 =2.0 sccm than in the film at f N 2 =0.3 sccm. Thermodynamic consideration indicated that since the activity of Ti in δ-(Ti, Mo)N decreases with increasing N content, Mo oxidation is promoted in the film at f N 2 =2.0 sccm, which leads to better wear properties. Graphical abstract: Highlights: Effect of nitrogen content on the wear properties in (Ti, Mo)N film was examined. The film at a high nitrogen gas flow rate showed a low friction coefficient. The enhancement of adhesive wear resistance is due to the Mo oxide formation. Oxidation of Mo easily occurred in the film at a high nitrogen gas flow rate. Since the activity of Ti decreased with increasing N, Mo oxidation was promoted.