Direct patterning process for tungsten trioxide nano-to-micro structures. Issue 7 (8th August 2016)

• Record Type: Journal Article
• Authors: Moon, Sungjin; Choi, Hak-Jong; Jun, Junho; Huh, Daihong; Kim, Chaehyun; Lee, Hee-Chul; Lee, Heon
• Is Part Of: Applied spectroscopy reviews. Volume 51:Issue 7/9(2016)
• Page Start: 582
• Page End: 591
• Publication Date: 2016-08-08
• Subjects: Tungsten trioxide (WO3) -- nanoparticle-dispersed resin -- nano-to-micro structure -- direct imprinting -- photo-electrochemical cell -- photocurrent; Spectrum analysis -- Periodicals; 535.84
• DOI: 10.1080/05704928.2016.1166372
• Languages: English
• ISSNs: 0570-4928

Abstract

ABSTRACT: Compared to conventional and complex processes, including deposition, photolithography, and plasma-etching processes, WO3 nano-to-micro structures were successfully fabricated using direct imprinting process using WO3 nanoparticle-dispersed resin and consecutive annealing on any substrates in a simpler and more cost-effective manner. WO3 nanoparticle dispersed resins with various concentrations were evaluated for direct imprinting of WO3 . The pattern fidelity and the surface morphology of imprinted WO3 nano-to-micro structures were characterized with field emission SEM. X-ray diffractionpattern was used to investigate the effect of annealing process on crystallinity of WO3 nano-to-micro structures. The crystal structure of imprinted WO3 was transformed from a hexagonal phase into a monoclinic phase by annealing. Optical transmittance of WO3 structures were also investigated using UV-vis spectroscopy. It was confirmed that diffused transmittance of WO3 structures could be increased up to 70% at 550 nm of wavelength without noticeable reduction of total transmittance, which is potentially applicable in the field of optoelectronic devices. Photo-electrochemical cells made of imprinted WO3 structure were properly operated.