Cite
HARVARD Citation
Tang, F. et al. (n.d.). A study on the deep etching and ohmic contact process of 6H-SiC high-temperature pressure sensor. Proceedings of the Institution of Mechanical Engineers. pp. 23-27. [Online].
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Tang, F. et al. (n.d.). A study on the deep etching and ohmic contact process of 6H-SiC high-temperature pressure sensor. Proceedings of the Institution of Mechanical Engineers. pp. 23-27. [Online].