Real-time scan speed control of the atomic force microscopy for reducing imaging time based on sample topography. (March 2018)

• Record Type: Journal Article
• Authors: Zhang, Yingxu; Li, Yingzi; Shan, Guanqiao; Chen, Yifu; Wang, Zhenyu; Qian, Jianqiang
• Is Part Of: Micron. Volume 106(2018)
• Page Start: 1
• Page End: 6
• Publication Date: 2018-03
• Subjects: Atomic force microscopy -- Amplitude modulation -- Real-time control -- Fast imaging; Microscopy -- Periodicals; Electron Probe Microanalysis -- Periodicals; Microscopy -- Periodicals; Microscopie -- Périodiques; Microscopy; Periodicals; 502.82
• DOI: 10.1016/j.micron.2017.12.004
• Languages: English
• ISSNs: 0968-4328

Abstract

Highlights: A real-time scan speed control based on sample topography for fast imaging is proposed. The method adjusts the scan speed according to the tracking error of every point. The imaging rate is increased up to about 3 times without sacrificing any image quality. Abstract: Here, a novel method, real-time scan speed control for raster scan amplitude modulation atomic force microscopes (AM-AFMs), is proposed. In general, the imaging rate is set to a fixed value before the experiment, which is determined by the feedback control calculations on each imaging point. Many efforts have been made to increase the AFM imaging rate, including using the cantilever with high eigenfrequency, employing new scan methods, and optimizing other mechanical components. The proposed real-time control method adjusts the scan speed linearly according to the error of every imaging point, which is mainly determined by the sample topography. Through setting residence time on each imaging point reasonably, the performance of AM-AFMs can be fully exploited while the scanner vibration is avoided when scan speed changes. Experiments and simulations are performed to demonstrate this control algorithm. This method would increase the imaging rate for samples with strongly fluctuant topography up to about 3 times without sacrificing any image quality, especially in large-scale and high-resolution imaging, in the meanwhile, it reduces the professional requirements for AM-AFM operators. Since the control strategy employs a linear algorithm to calculate the scanning speed based on the error signal, the proposed method avoids the frequent switching of the scanning speed between the high speed and the low speed. And it is easier to implement because there is no need to modify the original hardware of the AFM for its application.