Cite
HARVARD Citation
Jia, X. et al. (2018). Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks. Journal of process control. pp. 44-54. [Online].
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Jia, X. et al. (2018). Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks. Journal of process control. pp. 44-54. [Online].