Scanning transmission electron microscopy technique for morphology analysis of anodic oxide film formed on titanium. (May 2015)

• Record Type: Journal Article
• Authors: Liu, Z.; Hashimoto, T.; Tsai, I.-Ling; Thompson, G.E.; Skeldon, P.; Liu, H.
• Is Part Of: Vacuum. Volume 115(2015)
• Page Start: 19
• Page End: 22
• Publication Date: 2015-05
• Subjects: STEM-in-SEM -- Anodic oxide film -- Titanium -- 6-specimen carousel holder; Vacuum -- Periodicals; 621.55
• DOI: 10.1016/j.vacuum.2015.01.027
• Languages: English
• ISSNs: 0042-207X

Abstract

Abstract: The application of scanning transmission electron microscopy for morphological observation of anodic oxide films formed on titanium has been successfully explored. Important details of anodic films are readily recorded from high quality images by scanning transmission electron microscopy, which enabled the study of the film morphology, identification of film thickness and the presence of oxygen bubble features. By combining the large field of view with flexible magnification ranges in the scanning transmission electron microscopy, it was possible to study the morphology of the oxide film. A 6-specimen carousel holder would provide an increase in productivity by ∼20% compared with a conventional, single-specimen scanning transmission electron microscopy or transmission electron microscopy. Highlights: STEM-in-SEM can be used for anodic film investigations on titanium. Important structural details of anodic films would be easily obtained. High quality imaging of film thickness and oxygen bubbles can be obtained. An increase in productivity by ∼20% is produced using a 6-specimen carousel.