Synthesis and Properties of a Photopatternable Lithium‐Ion Conducting Solid Electrolyte. Issue 1 (14th November 2017)

• Record Type: Journal Article
• Authors: Choi, Christopher S.; Lau, Jonathan; Hur, Janet; Smith, Leland; Wang, Chunlei; Dunn, Bruce
• Is Part Of: Advanced materials. Volume 30:Issue 1(2018)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2017-11-14
• Subjects: lithium‐ion batteries -- microelectronics -- photopatternable electrolytes -- solid‐state electrolytes; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adma.201703772
• Languages: English
• ISSNs: 0935-9648

Abstract

Abstract: One of the important considerations for the development of on‐chip batteries is the need to photopattern the solid electrolyte directly on electrodes. Herein, the photopatterning of a lithium‐ion conducting solid electrolyte is demonstrated by modifying a well‐known negative photoresist, SU‐8, with LiClO4 . The resulting material exhibits a room temperature ionic conductivity of 52 µS cm −1 with a wide electrochemical window (>5 V). Half‐cell galvanostatic testing of 3 µm thin films spin‐coated on amorphous silicon validates its use for on‐chip energy‐storage applications. The modified SU‐8 possesses excellent mechanical integrity, is thermally stable up to 250 °C, and can be photopatterned with micrometer‐scale resolution. These results present a promising direction for the integration of electrochemical energy storage in microelectronics. Abstract : The photopatterning of a lithium‐ion conducting solid electrolyte is demonstrated by modifying a negative photoresist, SU‐8, with lithium salts. The patterned material exhibits good electrochemical properties with a room temperature ionic conductivity of 52 µS cm −1, which is comparable to polymer solid electrolytes. The materials also demonstrate excellent mechanical integrity and thermal stability.