Optimization of a 2-DOF micro-positioning stage using corrugated flexure units. (March 2018)

• Record Type: Journal Article
• Authors: Wang, Nianfeng; Zhang, Zhiyuan; Zhang, Xianmin; Cui, Chaoyu
• Is Part Of: Mechanism and machine theory. Volume 121(2018)
• Page Start: 683
• Page End: 696
• Publication Date: 2018-03
• Subjects: Corrugated flexure stage -- Stiffness matrix method -- Off-axis/axial stiffness ratio; Machine theory -- Periodicals; Machinery -- Periodicals; Machines -- Périodiques; Génie mécanique -- Périodiques; Machine theory; Machinery; Periodicals; 621.81
• DOI: 10.1016/j.mechmachtheory.2017.11.021
• Languages: English
• ISSNs: 0094-114X

Abstract

Highlights: This paper presents an analytical model that can be utilized in the design and optimization of a 2-DOF micro-positioning stage using corrugated flexure (CF) units. Stiffness components of the CF beam and the middle stage of CF stage are derived through stiffness matrix method. Numerical simulations are carried out to detect possible trends in the way the geometric parameters of CF unit influence the off-axis/axial stiffness ratio. The dimensions of CF stage have been optimized, leading to a CF stage with higher off-axis/axial stiffness ratio and larger range of motion. Abstract: This paper presents an analytical model that can be utilized in the design and optimization of a 2-DOF micro-positioning stage using corrugated flexure (CF) units. Stiffness components of the CF beam and the middle stage of CF stage are derived through stiffness matrix method. Numerical simulations indicate smaller length of straight segment, smaller thickness and larger number of CF units are better for maximizing the off-axis/axial stiffness ratio. Further, the dimensions of CF stage have been optimized, leading to a CF stage with higher off-axis/axial stiffness ratio and larger range of motion. The optimal result is validated by the finite element analysis (FEA) and experiments.