Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser. Issue 1 (2nd January 2017)

• Record Type: Journal Article
• Authors: Fang, Zhiwei; Yao, Ni; Wang, Min; Lin, Jintian; Zhang, Jianhao; Wu, Rongbo; Qiao, Lingling; Fang, Wei; Lu, Tao; Cheng, Ya
• Is Part Of: International journal of optomechatronics. Volume 11:Issue 1(2017)
• Page Start: 47
• Page End: 54
• Publication Date: 2017-01-02
• Subjects: Double disk -- integrated optics -- lithium niobate -- microfabrication -- microresonator; Optical engineering -- Periodicals; Mechanical engineering -- Periodicals; Electrical engineering -- Periodicals; Photonics -- Periodicals; Mechatronics -- Periodicals; 621.36
• DOI: 10.1080/15599612.2017.1406024
• Languages: English
• ISSNs: 1559-9612

Abstract

ABSTRACT: We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 10 5 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.