Design of Thin Film Capacitive Sensor for Flow Measurement. (2016)

• Record Type: Journal Article
• Authors: Kumaresh, K.J.; Deepak Raj, P.; Sridharan, M.
• Is Part Of: Materials today. Volume 3:Number 6(2016)
• Page Start: 1517
• Page End: 1524
• Publication Date: 2016
• Subjects: Thin films deposition -- Semi cylindrical capacitor -- Thermal evaporation -- Capacitive sensor -- Static flow measurement; Materials science -- Congresses -- Periodicals; 620.1
• DOI: 10.1016/j.matpr.2016.04.036
• Languages: English
• ISSNs: 2214-7853

Abstract

Abstract: We report the design methodology of thin film capacitor (TFC) device using thermal evaporation technique for quality study or material differentiation application by testing with liquid (different concentration) and solid. A simple and special modification was incorporated in thermal evaporation setup for depositing semi cylindrical capacitor design on a capillary tube (CT). In order to avoid the disturbance due to electrostatic noise disturbance, TFC was covered with another glass tube, aluminum (Al) metal foil (as shield) and finally by plastic tube cover. Electrodes were taken from the film using silvers paste and connected as input to the LCR-Z meter. The capacitance value of the thin film was varied up to 15-16 pF from the initial value (Al: 129 pF, Cu: 130 pF) when subjected to the static flow. A low cost embedded micro controller module with Liquid Crystal Display (LCD) was developed for the real time testing of TFC.