Optical properties of antireflective flat or rough patterned topped silicon cones gratings. (January 2015)

• Record Type: Journal Article
• Authors: Le Rouzo, Judikaël; Brückner, Jean-Baptiste; Ferchichi, Abdelkerim; Gourgon, Cécile; Berginc, Gérard; Escoubas, Ludovic
• Is Part Of: Advanced device materials. Volume 1:Number 1(2015)
• Page Start: 23
• Page End: 26
• Publication Date: 2015-01
• Subjects: Diffraction gratings -- Antireflection coatings -- Silicon pyramidal structures -- Scattering; Nanostructured materials -- Periodicals; 620.115
• DOI: 10.1179/2055031614Y.0000000005
• Languages: English
• ISSNs: 2055-0308

Abstract

Abstract : Achieving a broadband antireflection property from material surfaces is one of the highest priorities in photosensing applications. To demonstrate a low reflectance, we are concerned with the study of the optical response of flat-, patterned- and rough-top silicon cone gratings. Based on previous work exploring pyramid gratings, we first designed several flat top structures that theoretically demonstrate an antireflective character within the middle infrared region. In order to extend the antireflective properties up to the visible wavelengths, patterned- and rough-topped cones have been fabricated as well. Optical characterizations of several samples were carried out in the visible and mid infrared range, in order to determine the effect of structuration on the performances of the different cones gratings.