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Chen, J. et al. (2017). Simulation and experimental research on the parameter distribution of low-pressure Ar/O2 inductivly coupled plasma. Vacuum. pp. 77-85. [Online].
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Chen, J. et al. (2017). Simulation and experimental research on the parameter distribution of low-pressure Ar/O2 inductivly coupled plasma. Vacuum. pp. 77-85. [Online].