Cite
HARVARD Citation
Rueß, H. et al. (2017). HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films. Vacuum. pp. 285-289. [Online].
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Rueß, H. et al. (2017). HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films. Vacuum. pp. 285-289. [Online].