Cite
HARVARD Citation
Weber, M. et al. (2017). Mechanical properties of boron nitride thin films prepared by atomic layer deposition. CrystEngComm. 19 (41), pp. 6089-6094. [Online].
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Weber, M. et al. (2017). Mechanical properties of boron nitride thin films prepared by atomic layer deposition. CrystEngComm. 19 (41), pp. 6089-6094. [Online].